Atomic Layer Deposition System
of thickness and stoichiometry, conformal deposition, and low deposition temperature and energy) required to perform the planned cutting-edge research projects. The ALD system will be used to deposit functional [...] of thickness and stoichiometry, conformal deposition, and low deposition temperature and energy) required to perform the planned cutting-edge research projects. © LS MNE / TU Dortmund DFG Major Research …